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Cableless Electrostatic Chuck [Electrostatic Carrier]

New concept cableless electrostatic chuck

An electrostatic carrier is a tool that enables the adhesion of objects without cables, aiming to simplify and enhance the efficiency of the transport process. Typical electrostatic chucks adhere to objects when voltage is supplied and release them when the voltage is cut off, which means that the electrostatic chuck must always be connected to a power source during use. Therefore, there are cases where it is not suitable for applications such as long-distance transport, moving from atmospheric environments to vacuum chambers, or use in rotating mechanisms. On the other hand, the electrostatic carrier is a new adhesion method that applies the characteristics of electrostatic chucks. While it requires a connection to a power source during the detachment of objects, it does not need voltage supply to maintain adhesion, allowing it to be used disconnected from the power source. The electrostatic carrier contributes to the automation, efficiency, and reduction of running costs in processes that have previously relied on double-sided tape or clamping methods.